Ion Sources
Editat de Jianrong Zhang Autor Huashun Zhangen Limba Engleză Paperback – 3 dec 2010
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Specificații
ISBN-13: 9783642085024
ISBN-10: 3642085024
Pagini: 496
Ilustrații: XVIII, 476 p.
Dimensiuni: 155 x 235 x 26 mm
Greutate: 0.69 kg
Ediția:Softcover reprint of hardcover 1st ed. 1999
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany
ISBN-10: 3642085024
Pagini: 496
Ilustrații: XVIII, 476 p.
Dimensiuni: 155 x 235 x 26 mm
Greutate: 0.69 kg
Ediția:Softcover reprint of hardcover 1st ed. 1999
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany
Public țintă
ResearchCuprins
Introduction.- Gas Discharge Fundamentals.- Extraction System for Ion Sources.- Positive Ion Sources.- Giant Ion Sources.- Multiply Charged Ion Sources.- Mass and Energy Spectra of Ion Sources.- Negative Ion Sources.- Self-Neutralization of Beam Space Charge.- Beam Diagnostics for Ion Sources.
Caracteristici
This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing
Includes supplementary material: sn.pub/extras
Includes supplementary material: sn.pub/extras