Ion Sources

Editat de Jianrong Zhang Autor Huashun Zhang

en Limba Engleză Paperback – 3 dec 2010

While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally included, and the presentation of the necessary equations and diagrams for the various parameters makes this a useful handbook for ion sources.

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Springer Berlin, Heidelberg – 8 noi 1999	1341^.56 lei 43-57 zile

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Specificații

ISBN-13: 9783642085024
ISBN-10: 3642085024
Pagini: 496
Ilustrații: XVIII, 476 p.
Dimensiuni: 155 x 235 x 26 mm
Greutate: 0.69 kg
Ediția:Softcover reprint of hardcover 1st ed. 1999
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Introduction.- Gas Discharge Fundamentals.- Extraction System for Ion Sources.- Positive Ion Sources.- Giant Ion Sources.- Multiply Charged Ion Sources.- Mass and Energy Spectra of Ion Sources.- Negative Ion Sources.- Self-Neutralization of Beam Space Charge.- Beam Diagnostics for Ion Sources.

Caracteristici

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing
Includes supplementary material: sn.pub/extras

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