Ion Sources

Editat de Jianrong Zhang Autor Huashun Zhang

en Limba Engleză Hardback – 8 noi 1999

While dealing with the design and operation of ion sources, this book additionally discusses the physics of ion formation of the various elements with different charge states and charge neutralization. Ion selection and beam diagnostics are equally included, and the presentation of the necessary equations and diagrams for the various parameters makes this a useful handbook for ion sources.

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Specificații

ISBN-13: 9783540657477
ISBN-10: 3540657479
Pagini: 500
Ilustrații: XVIII, 476 p.
Dimensiuni: 155 x 235 x 32 mm
Greutate: 0.87 kg
Ediția:1999
Editura: Springer Berlin, Heidelberg
Colecția Springer
Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Introduction.- Gas Discharge Fundamentals.- Extraction System for Ion Sources.- Positive Ion Sources.- Giant Ion Sources.- Multiply Charged Ion Sources.- Mass and Energy Spectra of Ion Sources.- Negative Ion Sources.- Self-Neutralization of Beam Space Charge.- Beam Diagnostics for Ion Sources.

Caracteristici

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing
Includes supplementary material: sn.pub/extras

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