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Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids de R. Behrisch

Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids: Topics in Applied Physics, cartea 47

Editat de R. Behrisch
en Limba Engleză Paperback – 23 aug 2014

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Specificații

ISBN-13: 9783662308882
ISBN-10: 3662308886
Pagini: 300
Ilustrații: XI, 284 p. 19 illus.
Dimensiuni: 155 x 235 x 16 mm
Greutate: 0.42 kg
Ediția:Softcover reprint of the original 1st ed. 1981
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Topics in Applied Physics

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

and overview.- Sputtering by ion bombardment theoretical concepts.- Theoretical aspects of monocrystal sputtering.- Sputtering yield measurements.- Sputtering yields of single crystalline targets.