Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Systematic manual of bulk silicon microtechniques Includes supplementary material: sn.pub/extras