Microelectromechanical systems are one of the most advanced forms of technology available to mankind. Their applications are spread across multiple industries. The chapters included in this book are an assimilation of studies from areas like applications of micromachines, nanoelectromechanical systems, microdevices, etc. that provide a comprehensive understanding of this field. While understanding the long-term perspectives of the topics, the book makes an effort in highlighting their impact as a modern tool for the growth of the discipline. This book will help the readers in keeping pace with the rapid changes in this field.