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Wafer Manufacturing de Imin Kao

Wafer Manufacturing

Autor Imin Kao, Chunhui Chung
en Limba Engleză Hardback – 29 mar 2021
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
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Specificații

ISBN-13: 9780470061213
ISBN-10: 0470061219
Pagini: 304
Dimensiuni: 168 x 246 x 20 mm
Greutate: 0.68 kg
Ediția:New.
Editura: Wiley
Locul publicării:Chichester, United Kingdom

Public țintă

The main market will be engineers and industrial practitioners involved in wafer production and manufacturing/semiconductor industry. The secondary market will be postgraduate students & research institutes or laboratories as well as members of professional organizations such as SME, American Society of Mechanical Engineering (ASME), Institute of Electrical and Electronics Engineers (IEEE) and American Physical Society.

Notă biografică

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS. Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.

Descriere

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.