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Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography de R. Behrisch

Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography: Topics in Applied Physics, cartea 52

Editat de R. Behrisch
en Limba Engleză Paperback – 23 aug 2014

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Specificații

ISBN-13: 9783662311691
ISBN-10: 3662311690
Pagini: 412
Ilustrații: XIII, 394 p.
Dimensiuni: 152 x 229 x 22 mm
Greutate: 0.55 kg
Ediția:Softcover reprint of the original 1st ed. 1983
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria Topics in Applied Physics

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

and overview.- Sputtering of multicomponent materials.- Chemical sputtering.- Sputtering by electrons and photons.- Sputtering of solids with neutrons.- Heavy ion sputtering induced surface topography development.- Development of surface topography due to gas ion implantation.