MEMSdevicesarefindingincreasinglywidespreaduseinavarietyofsettings,fromchemicalandbiologicalanalysistosensorsandactuatorsinautomotiveapplications.Alongwiththismassivegrowth,thefieldisstillexperiencinggrowingpainsasfabricationprocessesarerefinedandnewapplicationsareattempted.AnyoneseriousaboutenteringthefieldmusthavearealisticknowledgeofjustwhatispossiblewithMEMStechnologiesaswellasthemyriadissuesinvolvedinfabricationanddeviceintegration.Microengineering,MEMS,andInterfacing:APracticalGuideprovidesastraightforward,down-to-earthoverviewofthecurrentstateofMEMStechnology.Thefirstsectionsystematicallyreviewsthevariousbulkandsurfacemicromachiningmethods,photolithographymasks,andnonsiliconprocesses,examiningtheircapabilities,limitations,andsuggesteduses.Next,theauthordetailsthecharacteristicsofindividualdevicesandsystems,theiradvantagesandshortcomings,andhowtheycanbecombinedtoachievedesiredfunctionality.HeincludescondensedintroductionstorelevantchemistryandbiochemistryandthendemonstratesapplicationsofMEMSintheseareas.Beginningwithashortintroductiontoelectronics,thefinalsectionexplorestheissuesinvolvedininterfacingMEMScomponentswithothersystems.Withjudicioususeofillustrationstoclarifythediscussion,Microengineering,MEMS,andInterfacing:APracticalGuideoffershands-ontoolsforsolvingspecificproblemsalongwiththeinsightnecessarytousethemmosteffectively.