MEMS, or micro electro-mechanical systems, is a technology associated with the manufacturing of microscale devices such as sensors, transducers, actuators, gears, pumps, switches, etc. These microscopic integrated devices combine electronic, electrical and mechanical elements. These elements work together, using microsystems technology, to carry out a single functional requirement. Sensors that are designed and manufactured using this technology are called MEMS sensors. Accelerometers, gyroscopes, magnetometers, pressure sensors, airflow sensors, microphones, temperature sensors, fuel sensors, impact sensors, etc., are some of the various MEMS sensors. They find applications in the automobile, chemical and pharmaceutical sectors, as well as, environmental and health sciences, computing and communications, and consumer products. There has been rapid progress in this field and its applications are finding their way across multiple industries. Different approaches, evaluations, methodologies and advanced studies on MEMS sensors have been included in this book. It is a vital tool for all researching or studying this field as it gives incredible insights into emerging trends and concepts.