Due to new technological progress in the development of ionsources and accelerators interesting kinds of beams are nowavailable. They open new fields for materials research withion beams. The present status and future possibilities ofthese research activities are described by experts on thisfield in the form of review articles. The papers presentedin the book focus on very different aspects ranging from thefield of truly appliedresearch to the field of fundamentalatomic research investigating interaction mechanisms ofslow, highly charged particles with surfaces.The book is intended to provide a source of informationabout recent developments in basic research for thephysicists about the status ofthe input of their work intoapplied materials science. In addition, also other wellestablished techniques, such as Rutherford backscatteringanalysis and their use in materials research such as of HTCare described. The reader of this book will benefit from itsbroad view over the various methods of materilas researchwith ion beams.