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Introduction to VLSI Process Engineering de Y. Naka

Introduction to VLSI Process Engineering

Editat de Y. Naka, K. Sugawara, C. McGreavy
en Limba Engleză Hardback – 30 iun 1993
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
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Specificații

ISBN-13: 9780412395505
ISBN-10: 0412395509
Pagini: 210
Ilustrații: XIII, 210 p.
Dimensiuni: 155 x 235 x 14 mm
Greutate: 0.5 kg
Ediția:1993
Editura: SPRINGER NETHERLANDS
Colecția Springer
Locul publicării:Dordrecht, Netherlands

Public țintă

Research

Cuprins

1 Coming age of VLSI.- 1.1 Functionality.- 1.2 Use in consumer products.- 1.3 Impact on industry.- 1.4 Future trends.- 2 Semiconductor market.- 2.1 Features of the semiconductor industry.- 2.2 Types and classification of semiconductors.- 2.3 Expanding semiconductor market.- 2.4 Trends in associated industries.- 2.5 Future prospects.- 3 Evolution of semiconductors.- 3.1 History of semiconductor technology.- 3.2 Future developments.- 4 Characteristics of VLSI.- 4.1 Device structures.- 4.2 Memory types.- 4.3 Arrangement of VLSI devices.- 4.4 New devices.- 5 VLSI process engineering operations.- 5.1 Aspects of production.- 5.2 Basic processing technology.- 6 Packaging and process monitoring technology.- 6.1 Packaging.- 6.2 Process monitoring techniques.- 7 Production of silicon wafers and environmental problems.- 7.1 Silicon wafers.- 7.2 Chemicals used in VLSI processing.- 7.3 Environmental considerations.- 8 Process engineering aspects of VLSI production.- 8.1 Basic issues in processing.-8.2 Opportunities for innovation.- Appendix A Glossary.- Appendix B List of abbreviations.- References.

Recenzii

...an extremely good text... - Microelectronics Journal