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Introduction to Microsystem Design de Werner Karl Schomburg

Introduction to Microsystem Design: RWTHedition

Autor Werner Karl Schomburg
en Limba Engleză Hardback – 8 iul 2015
This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
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Specificații

ISBN-13: 9783662470220
ISBN-10: 3662470225
Pagini: 325
Ilustrații: XXIV, 374 p. 380 illus., 332 illus. in color.
Dimensiuni: 155 x 235 x 27 mm
Greutate: 0.74 kg
Ediția:2nd ed. 2015
Editura: Springer Berlin, Heidelberg
Colecția Springer
Seria RWTHedition

Locul publicării:Berlin, Heidelberg, Germany

Public țintă

Research

Cuprins

Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.

Textul de pe ultima copertă

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
 

Caracteristici

Provides a thorough revision of the first edition Covers important topics in the field of micro systems Written by an expert in the field Includes supplementary material: sn.pub/extras

Notă biografică

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.