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Silicon Anodization as a Structuring Technique de Alexey Ivanov

Silicon Anodization as a Structuring Technique

Autor Alexey Ivanov
en Limba Engleză Paperback – 22 sep 2017
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
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Specificații

ISBN-13: 9783658192372
ISBN-10: 3658192372
Pagini: 348
Ilustrații: XXIX, 316 p. 141 illus., 3 illus. in color.
Dimensiuni: 148 x 210 x 19 mm
Greutate: 0.45 kg
Ediția:1st edition 2018
Editura: SpringerGabler
Locul publicării:Wiesbaden, Germany

Textul de pe ultima copertă

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Contents
  • Silicon Anodization: State of the Art
  • Experimental, Characterization and Simulation Methods
  • Microscale Study of Anodization Process
  • Anodization Process as a Structuring Technique: Experiments and Simulation
Target Groups
  • Researchers and students of microsystems technology, electrochemistry, microengineering
  • Practitioners in the area of microsystems, silicon processing and electrochemical material processing
<The Author
Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.​

Caracteristici

Study in technical sciences Includes supplementary material: sn.pub/extras