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MEMS Mechanical Sensors: Mems--Microelectromechanical S

Autor Stephen Beeby
en Limba Engleză Hardback – apr 2004
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
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Specificații

ISBN-13: 9781580535366
ISBN-10: 1580535364
Pagini: 269
Ilustrații: 1
Dimensiuni: 184 x 264 x 20 mm
Greutate: 0.64 kg
Editura: Artech House Publishers
Colecția Mems--Microelectromechanical S
Seria Mems--Microelectromechanical S


Descriere

Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.