The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. Comprehensive Microsystems, Second Edition, Three Volume Set, represents the authoritative primary reference source on microsystems and is now newly updated to reflect the latest advances in this exciting engineering field. This major reference work provides an exhaustive overview of the range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications. The new edition has been considerably revised and updated to include newer technologies such as ultrafast laser machining, 3D printing for biomedical applications, wearable sensors, microanalytical systems, and more. Each expertly written article provides a concise overview of a particular aspect of microsystems, and is accompanied by extensive references, guiding the user to the most relevant further reading within the ever-expanding available literature.

• Provides a detailed overview microsystems field, newly updated to cover the latest advances
• Maximizes research efficiency by compiling established information into one concise resource with consistently formatted　chapters
• Provides an essential reference source for both academics and professionals in the field