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Fundamental Principles of Optical Lithography de Chris Mack

Fundamental Principles of Optical Lithography

Autor Chris Mack
en Limba Engleză Hardback – feb 2008
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
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Specificații

ISBN-13: 9780470018934
ISBN-10: 0470018933
Pagini: 544
Dimensiuni: 177 x 248 x 37 mm
Greutate: 1.17 kg
Editura: Wiley
Locul publicării:Chichester, United Kingdom

Public țintă

Engineers, professionals, students

Notă biografică

Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He is also an adjunct faculty member at the University of Texas at Austin. Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.